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Small Metal Furnace | High Purity Heat Treatment to Reduce Contamination and Outgassing of Furnace Materials

Suppressing outgassing and dust generation from insulation materials and furnace materials in the metal hot zone.

The "metal furnace" is a small furnace designed for high-purity heat treatment, constructed with materials such as tungsten and molybdenum. In typical electric furnaces, outgassing, dust generation, and volatile components from insulation materials, furnace materials, and heater components can affect the surface condition and impurity concentration of the processed items. This equipment minimizes contamination from insulation materials and furnace material by using an all-metal construction inside the furnace, allowing for clean high-temperature processing under vacuum or inert gas atmospheres. It is particularly suitable for the pre-treatment, annealing, and surface treatment of materials that are sensitive to trace contamination from furnace materials, such as semiconductor materials, high-purity powders, oxide and nitride materials, and thin films and electrode materials. 【Features】 ■ Tungsten and molybdenum-based metal hot zone ■ Reduces outgassing and dust generation from insulation materials ■ Compatible with vacuum or inert gas atmospheres such as N2/Ar ■ Applicable for pre-treatment of high-purity powders and semiconductor materials ■ Compact design makes it easy to introduce for research and development and condition testing *For more details, please download the materials or contact us.

  • メタル炉2.jpg
  • Industrial Furnace
  • High purity heat treatment

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